3D Hybrid Optical Inspection System YRi-V
Multi-purpose optical inspection systems for all markets that realize super high-speed and high-accuracy 3D inspections. The mounted coaxial lighting and 5μm lenses added to the lineup support high-accuracy inspections in the device sector.
- Super high-speed 3D inspections
56.8cm²/sec (under optimum conditions) - Super high-accuracy 3D inspections
8-way projector - 4-way oblique imaging inspections
20Megapixels 4-angle camera - Device inspections
Super high-resolution 5μm/coaxial lighting